Pressure dependence of optical emission from DC magnetron sputtering plasma observed with spatial resolution

99/06/18


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INDEX

Title

Spatially Resolved OES

OES system (1)

OES system (2)

Optical System

Spatial Resolution

Spectrum Data Acquisition

Sputtering Deposition System

OE Spectra

DATA Processing

Assigned Lines

Pressure Dependence

Power Dependence

Optical Emission From Cu

Summary

 Author :Takeo Nakano

E-mail : nakano@apm.seikei.ac.jp

Home Page : http://surf.ap.seikei.ac.jp/~nakano/

Organization :
Dept. of Applied Physics Seikei University