slide No. 6 / 15

The spatial resolution of the OES system is evaluated by an 1.5 mm size of pinhole light source. Camera is located at 24 cm away from the light source, and moved laterally. 24 cm is a actual distance when we observe the sputtering plasma by this camera system.

Lateral position of the Camera is the horizontal axis, and the incident intensity is the vertical axis. It can be seen that the spatial resolution better than 5 mm is achieved.

The resolution does not strongly affected by the iris size.