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Optical emission from discharge plasma reflects various properties of the plasma. In case of magnetron discharge, which is far from spatially homogeneous, it is desirable to observe the spatial distribution of the emissions.

As an application of such an observation, for example, you may observe the Ar ion production and may optimize the magnetron configuration. You can predict the erosion track formation, and using the particle transport theory, you should be able to obtain the thickness profile of the deposited films.

Another interest may be in the distribution of the production of excited species as well as ions. Effects of such species are attracting attentions recently, to improve the film properties.