slide No. 7 / 12

Next, I would like to note the conditions we used when we implement our diffusive approach.

We treat the system with the rotational symmetry, and decrease the system dimension by one.

Ejection from the target is ruled under the cosine distribution for ejection angle, and the Thompson's formula for energy distribution.

We used the Born-Mayer type inter-atomic potential for the scattering of the sputtered particles with gas atoms.

Ambient gas motion is assumed to be a Maxwellian.

With BEM, constant node model is used. It means that the Theta and flux has a constant value on each split node.