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#11 [paper] º£Æü½¦¤Ã¤¿ÏÀʸ [APL 85(25)]

¡÷ Mechanisms of target poisoning during magnetron sputtering as investigated by real-time in situ analysis and collisional computer simulation:

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¡÷ Observation of self-sputtering in energetic condensation of metal ions:

´ðÈĤǤΠ(charge-state averaged) self-sputter Ψ¤Î¬Äê¡£Zr ¤È Au ¤Î cathode arc¡£ subst. bias ¤¬ -50V ¤¯¤é¤¤¤Ç sputter yield ¤¬ saturate ¤·¤Æ¤¤¤ë¤è¤¦¤Ë¸«¤¨¤ë (¬Äê¤Ï 0¡Á-100V ¤Þ¤Ç) ¤¬¡¢¤½¤ì¤Ï¤Ê¤ó¤Ç¤À¤í¤¦¡©

¡÷ A simple approach to determine five thermomechanical properties of thin ductile films on an elastic substrate:

beam curvature ¤Î²¹ÅÙÊѲ½Â¬Äê (3 ¼ïÎà) ¤«¤é¡¢E, ¦Ì, Ç®ËÄÄ¥·¸¿ô¡¢¹ßÉú±þÎÏ¡¢ÏĤ߹Ų½¡¢¤Î 5 ¸Ä¤Î¥Ñ¥é¥á¡¼¥¿¤ò·èÄꤹ¤ë¤È¤¤¤¦ÍýÏÀ¡£ ¼ÂºÝ¤ÎÏÀʸ¤ò¸«¤Æ¤ß¤ë¤È¡¢¤É¤¦¤â¼°¤Î·Á¤«¤é¤ß¤Æ ¤½¤ì¤Û¤É´Êñ¤Ç¤Ï¤Ê¤¤¤è¤¦¤Êµ¤¤¬¤¹¤ë¤¬¡£ ¸íº¹¤ÎÅÁÇŶñ¹ç¤Ï¤É¤ó¤Ê¤â¤ó¤À¤í¤«¡£

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